THE EMPERION

DUAL CHAMBER SPEED

The ArmorLube Emperion is an advanced dual chamber deposition system that applies hard coatings to substrates with unprecedented speed and thickness. Emperion’s dual chamber allows for near continuous operation for greater efficiency.

FEATURE OVERVIEW

  • Fast Deposition Rates
  • Quick Change
  • Remote Support
  • Multiple Coating Recipes
  • Low Profile

MACHINE OPTIONS

  • Dual Chamber Option with 10″ and 12″ Versions
  • Inner Armor World Remote Support and Monitoring
  • Pre-loaded Recipes
  • Custom designed research and development tool

SPECS

cost efficient pecvd coating solution

DIMENSIONS:

Length:
Clearance limit 194″ (4929mm)

Width:
Clearance limit 168″ (4255mm)

Height:
Clearance limit 96″ (2439mm)

Footprint:
Actual Machine 110″ (2794mm) X 96″ (2439mm) x 86″ (2185mm)

KEY MACHINE SPECS:

Deposition Rate:
Up to 0.5µm per minute

Max Chamber Size:
10″ Process Zone 10″ (254mm) x 36″ (914.4mm) • 12″ Process Zone 12″ (304.8mm) x 40″ (1016mm)

Power Requirements:
208V 100A 3 Phase 5 Wire with Ground (37.5 kVA) Chassis Ground Bar Required

Coating Types:
PECVD, Nitriding etc.

Dimensions

Length:

Clearance limit 194″ (4929mm)

Width:

Clearance limit 168″ (4255mm)

Height:

Clearance limit 196″ (2439mm)

Footprint:

Actual machine 110″ (2794mm) x 96″ (2439mm) x 86″ (2185mm)

Key Machine Specs

Deposition Rate:

Up to 0.5µm per minute

Max Chamber
Size:

10″ Process Zone 10″ (254mm) x 36″ (914.4mm) • 12″ Process Zone 12″ (304.8mm) x 40″ (1016mm)

Power Requirements:

208V 100A 3 Phase 5 Wire with Ground (37.5 kVA) Chassis Ground Bar Required

Coating Typess:

PECVD, Nitriding etc.